Mechanical properties ofa‐Si:H films studied by Brillouin scattering and nanoindenter
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.345064
Reference11 articles.
1. Effect of Deposition Conditions on Intrinsic Stress in a-Si: H Films
2. Possible configurational model for hydrogen in amorphous Si:H. An exodiffusion study
3. Effect of silane dilution on intrinsic stress in glow discharge hydrogenated amorphous silicon films
4. Hydrogen-related mechanical stress in amorphous silicon and plasma-deposited silicon nitride
5. Depth profiling of hydrogen by detection of recoiled protons
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