Effect of silane dilution on intrinsic stress in glow discharge hydrogenated amorphous silicon films
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.333148
Reference31 articles.
1. Structural model for amorphous silicon and germanium
2. Structure of Amorphous(Ge,Si)1−xYxAlloys
3. Microstructure of plasma‐deposited a‐Si : H films
4. Effects of inert gas dilution of silane on plasma‐deposited a‐Si:H films
5. Small-Angle-Scattering Evidence of Voids in Hydrogenated Amorphous Silicon
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