Deactivation of electrically active arsenic in silicon during cooling‐down from elevated temperatures
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.350629
Reference18 articles.
1. Rapid Thermal Annealing of As in Si
2. High‐Temperature Equilibrium Carrier Density of Arsenic‐Doped Silicon
3. Precipitation as the Phenomenon Responsible for the Electrically Inactive Arsenic in Silicon
4. Precipitation and Diffusivity of Arsenic in Silicon
5. Shallow junctions by high‐dose As implants in Si: experiments and modeling
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