Shallow junctions by high‐dose As implants in Si: experiments and modeling
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.328078
Reference12 articles.
1. Fabrication of a miniature 8K‐bit memory chip using electron‐beam exposure
2. Fully ion-implanted bipolar transistors
3. Design of ion-implanted MOSFET's with very small physical dimensions
4. Electrical and backscattering measurements of arsenic implanted silicon
5. The Diffusion of Ion‐Implanted Arsenic in Silicon
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