Affiliation:
1. Bell Laboratories, Reading, Pennsylvania 19603
Publisher
The Electrochemical Society
Subject
Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials
Cited by
133 articles.
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5. Accurate Determination of the Intrinsic Diffusivities of Boron, Phosphorus, and Arsenic in Silicon: The Influence of SiO2Films;Japanese Journal of Applied Physics;2008-08-08