Hydrogen-plasma etching of ion beam deposited c-BN films: An in situ investigation of the surface with electron spectroscopy
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1320031
Reference41 articles.
1. Review of advances in cubic boron nitride film synthesis
2. Electron optical characterization of cubic boron nitride thin films prepared by reactive ion plating
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4. Thresholds for the phase formation of cubic boron nitride thin films
5. The search for novel, superhard materials
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