Gettering of Pd to implantation-induced nanocavities in Si
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1597424
Reference12 articles.
1. Transition metals in silicon and their gettering behaviour
2. Gettering of nickel to cavities in silicon introduced by hydrogen implantation
3. Gettering of copper to hydrogen‐induced cavities in silicon
4. Gettering of platinum and silver to cavities formed by hydrogen implantation in silicon
5. Diffusion and trapping of Au to cavities induced by H-implantation in Si
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