1. Fraunhofer Institute for Electronic Nano Systems ENAS, 09126 Chemnitz, Germany
2. Center for Microtechnologies, Chemnitz University of Technology, 09126 Chemnitz, Germany
3. Institute of Physics, Chemnitz University of Technology, 09126 Chemnitz, Germany
4. Center for Advancing Electronics Dresden, TU Dresden, 01069 Dresden, Germany
5. Center for Materials, Architectures and Integration of Nanomembranes, Chemnitz University of Technology, 09107 Chemnitz, Germany
6. Institute of Ion Beam Physics and Materials Research, Helmholtz-Zentrum Dresden-Rossendorf, 01328 Dresden, Germany
7. Dresden Center for Nanoanalysis, TU Dresden, 01062 Dresden, Germany
8. Institute of Solid State Electronics, TU Wien, 1040 Vienna, Austria
9. Namlab gGmbH, 01187 Dresden, Germany
10. Fraunhofer Institute for Ceramic Technologies and Systems IKTS, 01277 Dresden, Germany
11. Institute of Electronics at the Bulgarian Academy of Sciences, 1784 Sofia, Bulgaria