Control of polytype formation in silicon carbide heteroepitaxial films by pulsed-laser deposition
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1649797
Reference12 articles.
1. A review of the structure of silicon carbide
2. High‐quality 4H‐SiC homoepitaxial layers grown by step‐controlled epitaxy
3. Growth mechanism of 6H‐SiC in step‐controlled epitaxy
4. Total energy differences between SiC polytypes revisited
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1. Synthesis of smooth amorphous thin films of silicon carbide with controlled properties through pulsed laser deposition;Applied Physics A;2022-04-05
2. Observation of the Initial Stage of 3C-SiC Heteroepitaxial Growth on the Si Nanomembrane;Crystal Growth & Design;2022-01-24
3. Vapour–liquid–solid-like growth of high-quality and uniform 3C–SiC heteroepitaxial films on α-Al2O3(0001) substrates;CrystEngComm;2021
4. Wurtzite SiC Formation in Plastic Deformed 3C and 6H;Materials Science Forum;2020-07
5. Imprinting the Polytype Structure of Silicon Carbide by Rapid Thermal Processing;Crystals;2020-06-18
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