Non-linear effects and electron heating dynamics in radio-frequency capacitively coupled plasmas with a non-uniform transverse magnetic field-Reference-Cited by-同舟云学术

Non-linear effects and electron heating dynamics in radio-frequency capacitively coupled plasmas with a non-uniform transverse magnetic field

Published:2021-05 Issue:5 Volume:28 Page:053505
ISSN:1070-664X
Container-title:Physics of Plasmas
language:en
Short-container-title:Physics of Plasmas

Author:

Liu Yue¹^ORCID,Trieschmann Jan²^ORCID,Berger Birk¹^ORCID,Schulze Julian¹³^ORCID,Mussenbrock Thomas¹^ORCID

Affiliation:

1. Department of Electrical Engineering and Information Science, Ruhr-University Bochum, D-44780 Bochum, Germany

2. Electrodynamics and Physical Electronics Group, Brandenburg University of Technology Cottbus-Senftenberg, D-03046 Cottbus, Germany

3. Key Laboratory of Materials Modification by Laser, Ion and Electron Beams, School of Physics, Dalian University of Technology, Dalian 116024, China

Funder

German Research Foundation

Plasmabasierte Prozessfuehrung von reaktiven Sputterprozessen

Publisher

AIP Publishing

Subject

Condensed Matter Physics

Link

https://aip.scitation.org/doi/pdf/10.1063/5.0045947

Reference47 articles.

1. Principles of Plasma Discharges and Materials Processing

2. Physics of Radio-Frequency Plasmas

3. The Gaseous Electronics Conference radio‐frequency reference cell: A defined parallel‐plate radio‐frequency system for experimental and theoretical studies of plasma‐processing discharges

4. The influence of the secondary electron induced asymmetry on the electrical asymmetry effect in capacitively coupled plasmas

5. Secondary electron induced asymmetry in capacitively coupled plasmas

Cited by 9 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. The dynamical behavior of the capacitively coupled argon plasma driven by very high frequency;Modern Physics Letters B;2024-03-12

2. Influence of magnetic field gradient on the capacitive argon discharge at 8 MHz and 40 MHz;Plasma Sources Science and Technology;2023-05-01

3. Electron dynamics in planar radio frequency magnetron plasmas: II. Heating and energization mechanisms studied via a 2d3v particle-in-cell/Monte Carlo code;Plasma Sources Science and Technology;2023-04-01

4. Enhanced plasma generation in capacitively coupled plasma using a parallel inductor;Plasma Sources Science and Technology;2022-06-01

5. PIC-DSMC simulation of nonequilibrium capacitively coupled plasma in low pressure;International Journal of Modern Physics C;2022-04-27