Amorphization and crystallization in high-dose Zn+-implanted silicon-Reference-Cited by-同舟云学术

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Amorphization and crystallization in high-dose Zn+-implanted silicon

Published:1997-02 Issue:3 Volume:81 Page:1143-1149
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:Journal of Applied Physics

Author:

Kalitzova M.,Simov S.,Yankov R. A.,Angelov Ch.,Vitali G.,Rossi M.,Pizzuto C.,Zollo G.,Fauré J.,Killian L.,Bonhomme P.,Voelskow M.

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

http://aip.scitation.org/doi/pdf/10.1063/1.363904

Reference10 articles.

1. High‐dose phenomena in zinc‐implanted silicon crystals

2. A systematic analysis of defects in ion-implanted silicon

3. Ion-beam-induced crystallization and amorphization of silicon

4. A Critical Regime for Amorphization of Ion Implanted Silicon

5. Mechanisms of amorphization in ion implanted crystalline silicon

Cited by 11 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Visualization and identification of nanoparticles in si subjected to the successive implantation of 64Zn+ and 16O+ ions;Bulletin of the Russian Academy of Sciences: Physics;2015-11

2. Study of the properties of a Si surface layer implanted with 64Zn+ and 16O+ ions during the formation of ZnO nanoparticles under thermal annealing;Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques;2015-05

3. Study of silicon implanted with zinc and oxygen ions via Rutherford backscattering spectroscopy;Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques;2014-07

4. HRTEM and XPS study of nanoparticle formation in Zn+ ion implanted Si;AIP Conference Proceedings;2014

5. ZnO Nanoparticle Formation in Si by Co-Implantation of Zn⁺ and O⁺Ions;Solid State Phenomena;2013-10

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