Ion-beam-induced crystallization and amorphization of silicon-Reference-Cited by-同舟云学术

Ion-beam-induced crystallization and amorphization of silicon

Published:1987-01 Issue: Volume:19-20 Page:435-442
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Elliman R.G.,Williams J.S.,Brown W.L.,Leiberich A.,Maher D.M.,Knoell R.V.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference29 articles.

1. Ion Implantation;Dearnaley,1973

4. ch. 8 in Ion Implantation and Beam Processing;Beanland,1984

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