Stopping power of a buffer gas for laser plasma debris mitigation-Reference-Cited by-同舟云学术

Stopping power of a buffer gas for laser plasma debris mitigation

Published:2009-12-15 Issue:12 Volume:106 Page:123301
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:Journal of Applied Physics

Author:

Bleiner Davide,Lippert Thomas

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

http://aip.scitation.org/doi/pdf/10.1063/1.3271142

Reference18 articles.

1. Conversion efficiencies from laser‐produced plasmas in the extreme ultraviolet regime

2. Comparative extreme ultraviolet emission measurements for lithium and tin laser plasmas

3. N. Fornaciari, R. Kanouff, and P. Michael, “Discharge source with gas curtain for protecting optics from particles,” Report No. PCT/US2002/024092, 2002.

4. Gas curtain for mitigating hydrocarbon contamination of EUV lithographic optical components

5. Debris mitigation for EUV sources using directional gas flows

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