A one‐dimensional collisional model for plasma‐immersion ion implantation
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.348774
Reference8 articles.
1. Model of plasma immersion ion implantation
2. Sheath and presheath in a collisionless plasma with a Maxwellian source
3. A collisional model of the plasma presheath
4. Spherical shell model of an asymmetric rf discharge
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