Nonthermal illumination effects on ultra-shallow junction formation-Reference-Cited by-同舟云学术

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Nonthermal illumination effects on ultra-shallow junction formation

Published:2011-05-09 Issue:19 Volume:98 Page:194104
ISSN:0003-6951
Container-title:Applied Physics Letters
language:en
Short-container-title:Appl. Phys. Lett.

Author:

Vaidyanathan Ramakrishnan,Felch Susan,Graoui Houda,Foad Majeed A.,Kondratenko Yevgeniy,Seebauer Edmund G.

Funder

U.S. Department of Energy

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

Link

http://aip.scitation.org/doi/pdf/10.1063/1.3571279

Reference19 articles.

1. MRS Symposia Proceedings;Lindsay R.,2003

2. Optical effects during rapid thermal diffusion

3. Diffusion of Phosphorus and Boron into Silicon at Low Temperatures by Heating with Light Irradiation

4. Photonic effects in the deactivation of ion implanted arsenic

5. Proceedings of RTP 2001 (RTP2001 and IEEE);Lojek B.,2001

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