Design and experimental research of a novel inchworm type piezo-driven rotary actuator with the changeable clamping radius
Author:
Funder
National Natural Science Foundation of China
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4788736
Reference20 articles.
1. Design of hysteresis-compensating iterative learning control for piezo-positioners: Application to atomic force microscopes
2. Design of a precision compliant parallel positioner driven by dual piezoelectric actuators
3. Characterization of piezoelectric PZT beam actuators for driving 2D scanning micromirrors
4. Design and control of a rotary dual-stage actuator positioning system
5. Particle swarm optimization based feedforward controller for a XY PZT positioning stage
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