Design of a precision compliant parallel positioner driven by dual piezoelectric actuators

Author:

Dong W.,Sun L.N.,Du Z.J.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference14 articles.

1. Error analysis of a flexure hinge mechanism induced by machining imperfection;Ryu;Precision Eng.,1997

2. Inverse kinematics modeling of a coupled flexure hinge mechanism;Ryu;Mechatronics,1999

3. B. Aruk, H. Hashimoto, M. Sitti, Man–machine interface for micro/nano manipulation with an AFM probe, IEEE International Conference on Nanotechnology, Maui, USA, 2001, pp. 151–156.

4. Design and analysis of a spatial 3-DOF micromanipulator for tele-operation;Chung,2001

5. Design of a compliant manipulator with nanometer range resolution;Yu;J. Chin. Mech. Eng.,2002

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