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2. Precision X–Y stage with a piezo-driven fine-table;Moriyama;Bull Japan Soc of Prec Eng,1988
3. Ultra precision wafer positioning by six-axis micro-motion mechanism;Taniguchi;Int J Japan Soc Prec Eng,1992
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5. Design and characterization of a low-profile micropositioning stage;Yang;Prec Eng,1996