Ultra low-K shrinkage behavior when under electron beam in a scanning electron microscope-Reference-Cited by-同舟云学术

Ultra low-K shrinkage behavior when under electron beam in a scanning electron microscope

Published:2013-08-28 Issue:8 Volume:114 Page:084508
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:Journal of Applied Physics

Author:

Lorut F.,Roggero A.,Imbert G.

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

http://aip.scitation.org/doi/pdf/10.1063/1.4819890

Reference12 articles.

1. L. Binghai, M. Zhiqiang, H. Younan, and T. Jennifer, in Proceedings of the 34th International Symposium for Testing and Failure Analysis (ASM International, Portland, 2008), pp. 291–293.

2. Radiation damage in the TEM and SEM

3. The role of ultraviolet radiation during ultralow k films curing: Strengthening mechanisms and sacrificial porogen removal

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