Influence of as‐deposited film structure on 〈100〉 texture in laser‐recrystallized silicon on fused quartz
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.94770
Reference14 articles.
1. Laser recrystallization of silicon stripes in SiO2grooves with a polycrystalline silicon sublayer
2. Use of selective annealing for growing very large grain silicon on insulator films
3. EFFECT OF CRYSTAL ORIENTATION ON OXIDATION RATES OF SILICON IN HIGH PRESSURE STEAM
4. Mobility Anisotropy of Electrons in Inversion Layers on Oxidized Silicon Surfaces
5. Crystal structure and thermal oxidation of laser‐recrystallized polycrystalline silicon
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4. Enhanced Grain Growth Phenomena in Excimer Laser Annealed Microcrystalline Silicon Films;Japanese Journal of Applied Physics;1998-02-15
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