Crystal structure and thermal oxidation of laser‐recrystallized polycrystalline silicon
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.91576
Reference6 articles.
1. Field-effects in polycrystalline-silicon films
2. cw laser anneal of polycrystalline silicon: Crystalline structure, electrical properties
3. Thin film MOSFET’s fabricated in laser‐annealed polycrystalline silicon
4. A monolithic integrated circuit fabricated in laser-annealed polysilicon
5. Structure and Stability of Low Pressure Chemically Vapor‐Deposited Silicon Films
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