Ion bombardment effects on microcrystalline silicon growth mechanisms and on the film properties
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1524707
Reference46 articles.
1. Thickness dependence of microcrystalline silicon solar cell properties
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3. p Channel thin film transistor and complementary metal–oxide–silicon inverter made of microcrystalline silicon directly deposited at 320°C
4. Effects of Ion Bombardment upon Microcrystalline Silicon Growth
5. Anatomy of μc-Si thin films by plasma enhanced chemical vapor deposition: An investigation by spectroscopic ellipsometry
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