Effects of impedance matching network on the discharge mode transitions in a radio-frequency inductively coupled plasma
Author:
Publisher
AIP Publishing
Subject
Condensed Matter Physics
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2931038
Reference29 articles.
1. CI.The electrodeless discharge through gases
2. The transition from the first to the second stage of the ring discharge
3. Operating high-density plasma sources in a low-density range: Applications to metal etch processes
4. Characterization of the E to H transition in a pulsed inductively coupled plasma discharge with internal coil geometry: bi-stability and hysteresis
5. Mode transitions in low pressure rare gas cylindrical ICP discharge studied by optical emission spectroscopy
Cited by 35 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Impedance matching design for capacitively coupled plasmas considering coaxial cables;Journal of Physics D: Applied Physics;2024-08-29
2. Self-mode transition, oscillation and inverse hysteresis in ECR discharges;AIP Advances;2023-09-01
3. Experimental investigation on the hysteresis in low-pressure inductively coupled neon discharge;Physics of Plasmas;2022-09
4. Best impedance matching seeking of single-frequency capacitively coupled plasmas by numerical simulations;Journal of Applied Physics;2022-08-28
5. Comments on mechanisms for self-E → H and inverse H → E mode transitions in radio frequency inductively coupled plasmas;Physics of Plasmas;2022-08
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3