In-line Si1-xGex epitaxial process monitoring and diagnostics using multiwavelength high resolution micro-Raman spectroscopy-Reference-Cited by-同舟云学术

In-line Si1-xGex epitaxial process monitoring and diagnostics using multiwavelength high resolution micro-Raman spectroscopy

Published:2012-06 Issue:2 Volume:2 Page:022117
ISSN:2158-3226
Container-title:AIP Advances
language:en
Short-container-title:AIP Advances

Author:

Chang Chun-Wei,Hong Min-Hao,Lee Wei-Fan,Lee Kuan-Ching,Yang Shen-Min,Tsai Ming-Shan,Chuang Yen,Fan Yu-Ta,Hasuike Noriyuki,Harima Hiroshi,Ueda Takeshi,Ishigaki Toshikazu,Kang Kitaek,Yoo Woo Sik

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

http://aip.scitation.org/doi/pdf/10.1063/1.4711043

Reference19 articles.

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4. Intrinsic Optical Absorption in Germanium-Silicon Alloys

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