Polycrystalline Si thin‐film transistors fabricated at ≤800 °C: Effects of grain size and {110} fiber texture
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.339610
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5. Implant‐dose dependence of grain size and {110} texture enhancements in polycrystalline Si films by seed selection through ion channeling
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