The effect of dopants on the texture formation in MBE-grown polysilicon films-Reference-Cited by-同舟云学术

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The effect of dopants on the texture formation in MBE-grown polysilicon films

Published:2000-09 Issue:9 Volume:45 Page:1212-1213
ISSN:1063-7842
Container-title:Technical Physics
language:en
Short-container-title:Tech. Phys.

Author:

Gracheva T. A.,Malygin N. D.,Shengurov D. V.,Shengurov V. G.

Publisher

Pleiades Publishing Ltd

Subject

Physics and Astronomy (miscellaneous)

Link

http://link.springer.com/content/pdf/10.1134/1.1318112.pdf

Reference6 articles.

1. K. T.-Y. Kung and R. Reif, J. Appl. Phys. 62, 1503 (1987).

2. K. T.-Y. Kung and R. Reif, J. Appl. Phys. 63, 2131 (1988).

3. D. A. Pavlov, V. G. Shengurov, D. V. Shengurov, and A. F. Khokhlov, Fiz. Tekh. Poluprovodn. (St. Petersburg) 29, 286 (1995) [Semiconductors 29, 142 (1995)].

4. D. V. Shengurov, Pis’ma Zh. Tekh. Fiz. 23(11), 83 (1997) [Tech. Phys. Lett. 23, 450 (1997)].

5. D. V. Shengurov, D. A. Pavlov, V. N. Shabanov, et al., Fiz. Tekh. Poluprovodn. (St. Petersburg) 32, 627 (1998) [Semiconductors 32, 562 (1998)].

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