A functional CMOS compatible MEMS pyroelectric detector using 12%-doped scandium aluminum nitride-Reference-Cited by-同舟云学术

A functional CMOS compatible MEMS pyroelectric detector using 12%-doped scandium aluminum nitride

Published:2020-11-02 Issue:18 Volume:117 Page:183506
ISSN:0003-6951
Container-title:Applied Physics Letters
language:en
Short-container-title:Appl. Phys. Lett.

Author:

Ng D. K. T.¹^ORCID,Zhang T.¹,Siow L. Y.¹,Xu L.¹,Ho C. P.¹,Cai H.¹,Lee L. Y. T.¹,Zhang Q.¹,Singh N.¹

Affiliation:

1. Institute of Microelectronics, A*STAR (Agency for Science, Technology and Research), 2 Fusionopolis Way, #08-02, Innovis Tower, Singapore 138634, Singapore

Funder

Agency for Science, Technology and Research

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

Link

http://aip.scitation.org/doi/pdf/10.1063/5.0024192

Reference24 articles.

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2. Enhanced AlN nanostructures for pyroelectric sensors

3. Pyroelectric devices and materials

4. Pyroelectricity: From Ancient Curiosity to Modern Imaging Tool

5. N. Calvano , P. Chrostoski , A. Voshell , K. Braithwaite , and M. Rana , in Wide Bandgap Power Devices and Applications II: Proceedings of SPIE Optical Engineering + Applications, San Diego, California, USA, 23 August 2017, edited by M. Matin , S. Chowdhury , and A. K. Dutta ( SPIE, 2017), Vol. 10381, pp. 103810J-1–103810J-8.

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