Pyroelectric aluminum nitride micro electromechanical systems infrared sensor with wavelength-selective infrared absorber
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4869442
Reference17 articles.
1. Micromachined infrared detectors based on pyroelectric thin films
2. A CMOS-MEMS Thermopile With Low Thermal Conductance and a Near-Perfect Emissivity in the 8–14-$\mu\hbox{m}$ Wavelength Range
3. Enhanced characteristics of an uncooled microbolometer using vanadium–tungsten oxide as a thermometric material
4. Wavelength selective uncooled infrared sensor by plasmonics
5. Wavelength-tunable microbolometers with metamaterial absorbers
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