Plasma-oxidation of Ge(100) surfaces using dielectric barrier discharge investigated by metastable induced electron spectroscopy, ultraviolet photoelectron spectroscopy, and x-ray photoelectron spectroscopy-Reference-Cited by-同舟云学术

Plasma-oxidation of Ge(100) surfaces using dielectric barrier discharge investigated by metastable induced electron spectroscopy, ultraviolet photoelectron spectroscopy, and x-ray photoelectron spectroscopy

Published:2011-08 Issue:3 Volume:110 Page:033302
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:Journal of Applied Physics

Author:

Wegewitz L.,Dahle S.,Höfft O.,Voigts F.,Viöl W.,Endres F.,Maus-Friedrichs W.

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

http://aip.scitation.org/doi/pdf/10.1063/1.3611416

Reference50 articles.

1. Effective electrical passivation of Ge(100) for high-k gate dielectric layers using germanium oxide

2. Radical oxidation of germanium for interface gate dielectric GeO2 formation in metal-insulator-semiconductor gate stack

3. Electrical Properties of Germanium Oxynitride and Its Interface with Germanium Prepared by Electron-Cyclotron-Resonance Plasma Oxidation and Nitridation

4. Passivation of Ge(100)∕GeO[sub 2]∕high-κ Gate Stacks Using Thermal Oxide Treatments

5. Oxygen adsorption on Ge(111) surface

Cited by 15 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Dielectric Barrier Discharge Plasma Deoxidation of Copper Surfaces in an Ar/SiH4 Atmosphere;Plasma Chemistry and Plasma Processing;2022-06-23

2. Reduction of copper surface oxide using a sub-atmospheric dielectric barrier discharge plasma;Applied Surface Science;2022-01

3. Precisely size-controlled fabrication of germanium pyramid array as an effective light-trapping material for photonic devices;Applied Physics A;2021-11-24

4. Superhydrophilic Coating of Pine Wood by Plasma Functionalization of Self-Assembled Polystyrene Spheres;Coatings;2021-01-20

5. Processing Strategies for High-Performance Schottky Contacts on n-Type Oxide Semiconductors: Insights from In2O3;ACS Applied Materials & Interfaces;2019-07-04