Photostimulated evaporation of SiO2films by synchrotron radiation
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.104167
Reference10 articles.
1. Synchrotron radiation‐induced etching of a carbon film in an oxygen gas
2. Synchrotron radiation‐excited chemical vapor deposition of SixNyHzfilm
3. Synchrotron radiation-excited chemical-vapor deposition and etching
4. Synchrotron radiation stimulated semiconductor processes: Chemical vapor deposition and etching
5. Synchrotron Radiation-Assisted Etching of Silicon Surface
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