Material and electrical characterization of carbon-doped Ta[sub 2]O[sub 5] films for embedded dynamic random access memory applications-Reference-Cited by-同舟云学术

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Material and electrical characterization of carbon-doped Ta[sub 2]O[sub 5] films for embedded dynamic random access memory applications

Published:2002 Issue:1 Volume:91 Page:308
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:J. Appl. Phys.

Author:

Chu K.,Chang J. P.,Steigerwald M. L.,Fleming R. M.,Opila R. L.,Lang D. V.,Van Dover R. B.,Jones C. D. W.

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Reference34 articles.

1. K. S. Tang, W. S. Lau, and G. S. Samudra, IEEE Circuits Devices Mag. , 27 (1997).

2. S. M. Sze,Physics of Semiconductors(Wiley, New York, 1981).

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