Evidence of extended cation solubility in atomic layer deposited nanocrystalline BaTiO3 thin films and its strong impact on the electrical properties-Reference-Cited by-同舟云学术

Evidence of extended cation solubility in atomic layer deposited nanocrystalline BaTiO3 thin films and its strong impact on the electrical properties

Published:2018 Issue:26 Volume:10 Page:12515-12525
ISSN:2040-3364
Container-title:Nanoscale
language:en
Short-container-title:Nanoscale

Author:

Falmbigl Matthias¹²³⁴,Karateev Igor A.⁵⁶⁷,Golovina Iryna S.¹²³⁴,Plokhikh Aleksandr V.¹²³⁴,Parker Thomas C.⁸⁴,Vasiliev Alexander L.⁵⁶⁷,Spanier Jonathan E.¹²³⁴⁹^ORCID

Affiliation:

1. Department of Materials Science & Engineering

2. Drexel University

3. Philadelphia

4. USA

5. National Research Center “Kurchatov Institute”

6. Moscow 123182

7. Russia

8. US Army Research Laboratory

9. Department of Electrical & Computer Engineering

Abstract

Enhanced cation solubility for atomic layer deposited metastable, nanocrystalline BaTiO₃ thin films strongly influences the electrical properties.

Funder

Office of Naval Research

Publisher

Royal Society of Chemistry (RSC)

Subject

General Materials Science

Link

http://pubs.rsc.org/en/content/articlepdf/2018/NR/C8NR01176A

Reference50 articles.

1. Functional Perovskites by Atomic Layer Deposition - An Overview

2. A Chemical Route to Monolithic Integration of Crystalline Oxides on Semiconductors

3. Process–property relationship in high-k ALD SrTiO3 and BaTiO3: a review

4. Metastability and microstructure evolution in the synthesis of inorganics from precursors11Paper presented at Sympos. Synergistic Synthesis of Inorganic Materials, March 1996, Schloß Ringberg, Germany.

5. Film growth model of atomic layer deposition for multicomponent thin films

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