{001}-textured Pb(Zr, Ti)O3 thin films on stainless steel by pulsed laser deposition-Reference-Cited by-同舟云学术

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{001}-textured Pb(Zr, Ti)O3 thin films on stainless steel by pulsed laser deposition

Published:2020-09-14 Issue:10 Volume:128 Page:104103
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:Journal of Applied Physics

Author:

Cardoletti Juliette¹^ORCID,Komissinskiy Philipp¹^ORCID,Bruder Enrico¹^ORCID,Morandi Carl²^ORCID,Alff Lambert¹^ORCID

Affiliation:

1. Institute of Materials Science, Technische Universität Darmstadt, Alarich-Weiss-Straße 2, 64287 Darmstadt, Germany

2. George W. Woodruff School of Mechanical Engineering, Georgia Institute of Technology, 771 Ferst Drive, Atlanta, Georgia 30332, USA

Funder

EIT RawMaterials IDS-FunMatInno

Deutsche Forschungsgemeinschaft

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

http://aip.scitation.org/doi/pdf/10.1063/5.0019967

Reference29 articles.

1. Thin Film Piezoelectrics for MEMS

2. Piezoelectric MEMS: Ferroelectric thin films for MEMS applications

3. Thin-film piezoelectric MEMS

4. Characterization of epitaxial Pb(Zr,Ti)O3thin films deposited by pulsed laser deposition on silicon cantilevers

5. Substrate effects on domain structures of PZT 30/70 sol-gel films via PiezoAFM

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