Characterization of epitaxial Pb(Zr,Ti)O3thin films deposited by pulsed laser deposition on silicon cantilevers-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Characterization of epitaxial Pb(Zr,Ti)O3thin films deposited by pulsed laser deposition on silicon cantilevers

Published:2010-07-12 Issue:8 Volume:20 Page:085022
ISSN:0960-1317
Container-title:Journal of Micromechanics and Microengineering
language:
Short-container-title:J. Micromech. Microeng.

Author:

Nguyen M D,Nazeer H,Karakaya K,Pham S V,Steenwelle R,Dekkers M,Abelmann L,Blank D H A,Rijnders G

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Reference58 articles.

1. Dynamic-mode AFM using the piezoelectric cantilever: investigations of local optical and electrical properties

2. Fabrication and characterization of micromachined accelerometers based on PZT thin films

3. A review of micropumps

4. Label free novel electrical detection using micromachined PZT monolithic thin film cantilever for the detection of C-reactive protein

Cited by 44 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Spatial mapping of photovoltage and light-induced displacement of on-chip coupled piezo/photodiodes by Kelvin probe force microscopy under modulated illumination;Beilstein Journal of Nanotechnology;2023-11-06

2. Wet etching of platinum (Pt) electrodes for piezoelectric transducers using a thick photoresist mask;Micro and Nano Engineering;2022-08

3. In situ high-temperature X-ray diffraction measurements of Pb(Zr_0.58Ti_0.42)O₃ epitaxial thin films grown on Si substrates;Japanese Journal of Applied Physics;2022-07-27

4. Synthesis and Characterization of Boron Thin Films Using Chemical and Physical Vapor Depositions;Coatings;2022-05-16

5. Micro Coriolis Mass Flow Sensor with Piezoelectric Transducers for Both Actuation and Readout;2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS);2022-01-09

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号京ICP备18003416号-3