Measurements of spatial and temporal sheath evolution for spherical and cylindrical geometries in plasma source ion implantation
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.348600
Reference16 articles.
1. Plasma source ion‐implantation technique for surface modification of materials
2. Plasma source ion implantation: A new, cost-effective, non-line-of-sight technique for ion implantation of materials
3. Plasma source ion implantation dose uniformity of a 2×2 array of spherical targets
4. Temporal evolution of collisionless sheaths
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