Structural evaluation of ions-implanted GaN films by photothermal deflection spectroscopy

Author:

Sumiya Masatomo1ORCID,Fukuda Kiyotaka12,Iwai Hideo3,Yamaguchi Tomohiro2,Onuma Takeyoshi2,Honda Tohru2

Affiliation:

1. Wide-Gap Semiconductor Group, National Institute for Materials Science, Namiki, Tsukuba 305-0044, Japan

2. Department of Applied Physics, School of Advanced Engineering, Graduate School of Engineering, Kogakuin University, 2665-1 Nakano, Hachioji, Tokyo 192-0015, Japan

3. Research Center for Advanced Measurement and Characterization, National Institute for Materials Science, Sengen, Tsukuba 305-0047, Japan

Funder

Ministry of Education, Culture, Sports, Science and Technology

Japan Society for the Promotion of Science

Publisher

AIP Publishing

Subject

General Physics and Astronomy

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