Comparison of the passivation effects on self- and non-self-aligned InP/InGaAs/InP double heterostructure bipolar transistors by low-temperature deposited SiNx
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1757656
Reference11 articles.
1. High gain InGaAs/InP heterostructure bipolar transistors grown by gas source molecular beam epitaxy
2. Over 300 GHz f/sub T/ and f/sub max/ InP/InGaAs double heterojunction bipolar transistors with a thin pseudomorphic base
3. Passivation of InGaAs surfaces and InGaAs/InP heterojunction bipolar transistors by sulfur treatment
4. Passivation of InP-based HBTs
5. Effects of (NH4)2S passivation on the performance of graded-base InGaAs/InP HBTs
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1. Characteristics of Room Temperature Silicon Nitride Deposited by Internal Inductively Coupled Plasma Chemical Vapor Deposition;Journal of Nanoscience and Nanotechnology;2014-08-01
2. Surface passivation of In0.83Ga0.17As photodiode with high-quality SiN layer fabricated by ICPCVD at the lower temperature;Infrared Physics & Technology;2014-01
3. Passivation of InP heterojunction bipolar transistors by strain controlled plasma assisted electron beam evaporated hafnium oxide;Applied Physics Letters;2012-01-02
4. Hafnium oxide passivation of InGaAs/InP heterostructure bipolar transistors by electron beam evaporation;physica status solidi (c);2011-11-02
5. Surface Passivation of InGaAs/InP HBTs Using Atomic Layer Deposited Al2O3;ECS Transactions;2011-04-25
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