Determination of the absolute CH3 radical flux emanating from a methane electron cyclotron resonance plasma
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.121713
Reference21 articles.
1. Plasma Deposition, Properties and Structure of Amorphous Hydrogenated Carbon Films
2. Properties of diamond-like carbon
3. A combined plasma‐surface model for the deposition of C:H films from a methane plasma
4. Mechanisms of the Deposition of Hydrogenated Carbon Films
5. Surface relaxation during plasma-enhanced chemical vapor deposition of hydrocarbon films, investigated byin situellipsometry
Cited by 38 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Molecular dynamics simulation of the interaction of an Ar/CH4 plasma with a surface: Growth, structure, and sputtering of the deposited C:H films;Plasma Processes and Polymers;2024-06-10
2. Molecular Dynamics Simulations of Hydrocarbon Film Growth from Acetylene Monomers and Radicals: Effect of Substrate Temperature;The Journal of Physical Chemistry C;2018-05-22
3. Review Article: Unraveling synergistic effects in plasma-surface processes by means of beam experiments;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2017-09
4. The effects of plasma inhomogeneity on the nanoparticle coating in a low pressure plasma reactor;Physics of Plasmas;2015-10
5. Toward a Better Understanding of the Influence of the Hydrocarbon Precursor on the Mechanical Properties of a-C:H Coatings Synthesized by a Hybrid PECVD/PVD Method;Plasma Processes and Polymers;2015-07-17
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3