Nano-oxidation of H-terminated p-Si(100): Influence of the humidity on growth and surface properties of oxide islands
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1338501
Reference16 articles.
1. Modification of hydrogen‐passivated silicon by a scanning tunneling microscope operating in air
2. Selective area oxidation of silicon with a scanning force microscope
3. Modification of Silicon Surface Using Atomic Force Microscope with Conducting Probe
4. Fabrication of nanometer‐scale structures using atomic force microscope with conducting probe
5. Nanometer‐scale modification of the tribological properties of Si(100) by scanning force microscope
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4. Precise Control of Nanofabrication by Atomic Force Microscopy;Journal of Nanoscience and Nanotechnology;2010-07-01
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