Metal film removal and patterning using a XeCl laser
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.94204
Reference9 articles.
1. Laser-generated RC networks
2. Optimal regime for forming topological patterns when processing films with laser radiation
3. Thin‐film machining by laser‐induced explosion
4. Two-phase mechanism of laser-induced removal of thin absorbing films. I. Theory
5. Two-phase mechanism of laser-induced removal of thin absorbing films. II. Experiment
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