Atomic oxygen and the thermal oxidation of silicon
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.99676
Reference11 articles.
1. General Relationship for the Thermal Oxidation of Silicon
2. Silicon Oxidation Studies: Some Aspects of the Initial Oxidation Regime
3. Thermal Oxidation of Silicon in Dry Oxygen Growth‐Rate Enhancement in the Thin Regime: I . Experimental Results
4. Thermal Oxidation of Silicon in Dry Oxygen: Growth‐Rate Enhancement in the Thin Regime: II . Physical Mechanisms
5. Evidence for a parallel path oxidation mechanism at the Si‐SiO2interface
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