Reaction of Ta thin film with single crystalline (001) β‐SiC
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.357629
Reference24 articles.
1. Thin film deposition and microelectronic and optoelectronic device fabrication and characterization in monocrystalline alpha and beta silicon carbide
2. Electrical Contacts to Beta Silicon Carbide Thin Films
3. Ohmic Contacts on β-SiC
4. Electrical and Chemical Characterization of Contacts to Silicon Carbide
5. SiC filament/titanium matrix composites regarded as model composites
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