Evaporation of Impurities from Semiconductors
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1722765
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1. Evaluation and Control of Resistivity in N−/N+ Epitaxial Depositions;Journal of The Electrochemical Society;1983-03-01
2. Segregation and desorption kinetics for evaporation of arsenic from silicon;Journal of Applied Physics;1979
3. Redistribution of dopant impurities in a semiconductor using the series method of Chen and Chen;Solid-State Electronics;1978-08
4. Impurity Atom Transfer during Epitaxial Deposition of Silicon;Journal of The Electrochemical Society;1973
5. Low concentration diffusion in silicon under sealed tube conditions;Solid-State Electronics;1972-10
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