Publisher
The Electrochemical Society
Subject
Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials
Cited by
24 articles.
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1. Critical review of the epitaxial growth of semiconductors by rapid thermal chemical vapor deposition;Materials Science and Engineering: R: Reports;1997-06
2. Effect of Transport Phenomena on Boron Concentration Profiles in Silicon Epitaxial Wafers;Journal of The Electrochemical Society;1996-02-01
3. Thin Film Deposition;Fundamentals of Semiconductor Processing Technology;1995
4. References;Thin Films by Chemical Vapour Deposition;1990
5. Silicon Liquid Phase Epitaxy: A Review;Journal of The Electrochemical Society;1986-01-01