Room temperature sputtering of inclined c-axis ZnO for shear mode solidly mounted resonators-Reference-Cited by-同舟云学术

Room temperature sputtering of inclined c-axis ZnO for shear mode solidly mounted resonators

Published:2016-01-18 Issue:3 Volume:108 Page:034103
ISSN:0003-6951
Container-title:Applied Physics Letters
language:en
Short-container-title:Appl. Phys. Lett.

Author:

Rughoobur G.¹^ORCID,DeMiguel-Ramos M.¹,Mirea T.²,Clement M.²,Olivares J.²,Díaz-Durán B.²,Sangrador J.²,Miele I.¹,Milne W. I.¹³,Iborra E.²^ORCID,Flewitt A. J.¹

Affiliation:

1. Electrical Engineering Division, Department of Engineering, University of Cambridge, 9 JJ Thomson Avenue, Cambridge, CB3 0FA, United Kingdom

2. GMME-CEMDATIC-ETSI de Telecomunicación, Universidad Politécnica de Madrid, 28040 Madrid, Spain

3. College of Information Science and Electronic Engineering, Zhejiang University, Hangzhou, 310027, People's Republic of China

Funder

European Commission (EC)

European Cooperation in Science and Technology (COST)

Cambridge Commonwealth, European and International Trust

Ministerio de Economía y Competitividad (MINECO)

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

Link

http://aip.scitation.org/doi/pdf/10.1063/1.4940683

Reference25 articles.

1. AlN-based sputter-deposited shear mode thin film bulk acoustic resonator (FBAR) for biosensor applications — A review

2. Biomolecular interactions and tools for their recognition: focus on the quartz crystal microbalance and its diverse surface chemistries and applications

3. Verwendung von Schwingquarzen zur W�gung d�nner Schichten und zur Mikrow�gung

4. Analytic comparison of the sensitivities of bulk‐wave, surface‐wave, and flexural plate‐wave ultrasonic gravimetric sensors

5. Localized and distributed mass detectors with high sensitivity based on thin-film bulk acoustic resonators

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