Engineering inclined orientations of piezoelectric films for integrated acoustofluidics and lab-on-a-chip operated in liquid environments

Author:

Fu Yong-Qing1234ORCID,Pang Hua-Feng12345ORCID,Torun Hamdi1234ORCID,Tao Ran12346ORCID,McHale Glen789104ORCID,Reboud Julien111213144ORCID,Tao Kai1516171819ORCID,Zhou Jian20212219ORCID,Luo Jingting623242519ORCID,Gibson Desmond262728294ORCID,Luo Jikui30313219ORCID,Hu PingAn3334353619ORCID

Affiliation:

1. Faculty of Engineering and Environment

2. Northumbria University

3. Newcastle upon Tyne

4. UK

5. Department of Applied Physics

6. Shenzhen Key Laboratory of Advanced Thin Films and Applications

7. Institute for Multiscale Thermofluids

8. School of Engineering

9. University of Edinburgh

10. Edinburgh EH9 3FB

11. Division of Biomedical Engineering

12. James Watt School of Engineering

13. University of Glasgow

14. Glasgow

15. Key Laboratory of Micro and Nano Systems for Aerospace

16. Ministry of Education

17. North Western Polytechnical University

18. Xi'an 710072

19. P. R. China

20. College of Mechanical and Vehicle Engineering

21. Hunan University

22. Changsha 410082

23. College of Physics and Energy

24. Shenzhen University

25. Shenzhen

26. Institute of Thin Films, Sensors & Imaging

27. University of the West of Scotland

28. Scottish Universities Physics Alliance

29. Paisley PA1 2BE

30. College of Information Science & Electronic Engineering

31. Zhejiang University

32. Hangzhou 310027

33. School of Materials Science and Engineering

34. MOE Key Laboratory of Micro-Systems and Micro-Structures Manufacturing

35. Harbin Institute of Technology

36. Harbin 150001

Abstract

Engineering orientations of inclined piezoelectric films allows simultaneous generation of multiple acoustic wave modes with multiple biosensing and acoustofluidic functions for an effective and integrated acoustic wave based lab-on-a-chip.

Funder

Foundation for Distinguished Young Talents in Higher Education of Guangdong

National Natural Science Foundation of China

Engineering and Physical Sciences Research Council

National Basic Research Program of China

Royal Academy of Engineering

Publisher

Royal Society of Chemistry (RSC)

Subject

Biomedical Engineering,General Chemistry,Biochemistry,Bioengineering

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