Author:
Suzuki Chihiro,Kadota Kiyoshi
Subject
Physics and Astronomy (miscellaneous)
Cited by
14 articles.
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1. Electron Interactions with CF4, C2F6, and C3F8;Fundamental Electron Interactions with Plasma Processing Gases;2004
2. CF A 2Σ+–X 2Π and B 2Δ–X 2Π study by broadband absorption spectroscopy in a plasma etch reactor: Determination of transition probabilities, CF X 2Π concentrations, and gas temperatures;The Journal of Chemical Physics;2003-01-08
3. Spatially resolved CF, CF2, SiF and SiF2 densities in fluorocarbon containing inductively driven discharges;Applied Surface Science;2002-05
4. CF, CF2, and SiF densities in inductively driven discharges containing C2F6, C4F8, and CHF3;Journal of Applied Physics;2001-01-15
5. Atomic fluorine emission cross sections observed in the 600-900 nm region following 0-500 eV electron impact on fluoromethanes (CF4, CHF3, CH2F2and CH3F);Journal of Physics B: Atomic, Molecular and Optical Physics;1999-11-18