Spatially resolved CF, CF2, SiF and SiF2 densities in fluorocarbon containing inductively driven discharges
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry
Reference39 articles.
1. Kinetics of Radicals in CF4and C4F8Electron Cyclotron Resonance Plasmas
2. Measurement of the gas temperature in fluorocarbon radio frequency discharges using infrared absorption spectroscopy
3. Infrared diode laser absorption spectroscopy measurements of CFX (X=1–3) radical densities in electron cyclotron resonance plasmas employing C4F8, C2F6, CF4, and CHF3 gases
4. Spatial Distribution Measurement of Absolute Densities of CF and CF 2 Radicals in a High Density Plasma Reactor Using a Combination of Single-Path Infrared Diode Laser Absorption Spectroscopy and Laser-Induced Fluorescence Technique
5. Infrared diode laser spectroscopy of the SiF radical
Cited by 16 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Response to “Comment on ‘The effects of radio-frequency bias on electron density in an inductively coupled plasma reactor’” [J. Appl. Phys. 132, 156101 (2022)];Journal of Applied Physics;2022-10-21
2. Dissociation channels of c-C4F8 to C2F4 in reactive plasma;Japanese Journal of Applied Physics;2022-10-01
3. Development of a probe-type optical absorption spectroscopic system for spatially resolved CF2 density measurement in inductively coupled C4F8/Ar plasmas;Review of Scientific Instruments;2020-01-01
4. Energy partitioning and its influence on surface scatter coefficients within fluorinated inductively coupled plasmas;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2017-09
5. The ab initio and potential energy curve of SiF2(1A1);Acta Physica Sinica;2014
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3