Neutral depletion in inductively coupled plasmas using hybrid-type direct simulation Monte Carlo
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2836938
Reference25 articles.
1. Measurements of electron temperature, electron density, and neutral density in a radio‐frequency inductively coupled plasma
2. Interpretation of neutral distribution through spatial profile of plasma emission
3. Neutral depletion and transport mechanisms in large-area high density plasma sources
4. Measurement of radial neutral pressure and plasma density profiles in various plasma conditions in large-area high-density plasma sources
5. Neutral gas density depletion due to neutral gas heating and pressure balance in an inductively coupled plasma
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