Neutral depletion and transport mechanisms in large-area high density plasma sources
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.371532
Reference10 articles.
1. Characterization of an azimuthally symmetric helicon wave high density plasma source
2. Measurements of electron temperature, electron density, and neutral density in a radio‐frequency inductively coupled plasma
3. Interpretation of neutral distribution through spatial profile of plasma emission
4. Hydromagnetic waves in a cylindrical plasma: an experiment
5. Large volume, high density rf inductively coupled plasma
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